Applications of Compact Laser-Driven EUV/XUV Plasma Sources

<table>Damage threshold measurements on Gold layers. (a): Damage probability plot for a 70 nm thick Gold layer. Middle: corresponding AFM images. (b): film thickness dependence.</table>

X-Ray Optics and Instrumentation

fig5

Figure 5

Figure 5: Applications of Compact Laser-Driven EUV/XUV Plasma Sources 