Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td align="left" rowspan="2">Day</td><td align="center" colspan="2">Top layer</td><td align="center" colspan="2">TMS film</td></tr><tr><td align="center">Index</td><td align="center">Thickness (nm)</td><td align="center">Index</td><td align="center">Thickness (nm)</td></tr><tr><td align="center" colspan="5"><hr/></td></tr><tr><td align="left">1</td><td align="center">1.51959</td><td align="center">7.1</td><td align="center">1.6815</td><td align="center">95.4</td></tr><tr><td align="left">7</td><td align="center">1.55123</td><td align="center">8.1</td><td align="center">1.659</td><td align="center">95.7</td></tr><tr><td align="left">15</td><td align="center">1.553</td><td align="center">8.8</td><td align="center">1.6465</td><td align="center">96.3</td></tr><tr><td align="left">50</td><td align="center">1.5799</td><td align="center">13.7</td><td align="center">1.624</td><td align="center">93.9</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

The index and thickness of both the top layer and the TMS film of oxygen-treated plasma-polymerized film at 632.8 nm. 

Journal of Atomic and Molecular Physics

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Table 1

Table 1: Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry 