Review Article
Recent Developments and Research Issues in Microultrasonic Machining
Table 2
Features of macro- and micro-USM.
| | Parameters | Micro-USM | Macro-USM |
| | Vibration frequency, kHz | Usually >20 | Usually >20 | | Vibrated part | Tool or Workpiece | Tool | | Amplitude, μm | Within microns (0.5~5) | Tens of microns (8~30) | | Abrasive particle size, μm | Within microns (0.5~5) | Tens of microns (50~300) | | Static load | Gram force | Kilogram force | | Tool/feature Size, mm (End diameter) | Within 0.5 | Usually >1 |
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