Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity
Figure 9
Measured soft X-ray reflectivity of [Mo (2.7 nm)/Si (6.3 nm)]5 ML at the same photon energies as simulated in Figure 8. The best fit is obtained for MoSi2 composition.
