Research Article

Titanium-Nickel Shape Memory Alloy Spring Actuator for Forward-Looking Active Catheter

Figure 2

Fabrication process of Ti-Ni SMA spring actuator.
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(a) Ti-Ni SMA sheetNi
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(b) Surface buffingA
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(c) Electroplating of Ni
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(d) Coating and patternning of photoresisitBB
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(e) Electrochemical etching of Ti-Ni
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(f) Etching of photoresist and Ni