International Scholarly Research Notices

Research Article

Thermodynamics and Oxidation Behaviour of Crystalline Silicon Carbide (3C) with Atomic Oxygen and Ozone

Figure 6

Equilibrium diagram of SiC oxidation with ozone (O3) at (a) , , and , (b) , , and , (c) , , and , and (d) , , and .
108781.fig.006a
(a)
108781.fig.006b
(b)
108781.fig.006c
(c)
108781.fig.006d
(d)