Research Article
Thermodynamics and Oxidation Behaviour of Crystalline Silicon Carbide (3C) with Atomic Oxygen and Ozone
Table 1
Reactions of SiC with O and O3.
| | Reactions with atomic oxygen | Reactions with ozone |
| 1 | SiC + 4O → SiO2 + CO2 | SiC + 4/3O3 → SiO2 + CO2 | 2 | SiC + 2O → SiO + CO | SiC + 2/3O3 → SiO + CO | 3 | SiC + 3O → SiO2 + CO | SiC + O3 → SiO2 + CO | 4 | SiC + 2O → SiO2 + C | SiC +2/3O3 → SiO2 + C | 5 | SiC + 3O → SiO + CO2 | SiC + O3 → SiO + CO2 | 6 | SiC + O → SiO + C | SiC + 1/3O3 → SiO + C | 7 | SiC + 2O → Si + CO2 | SiC + 2/3O3 → Si + CO2 | 8 | SiC + O → Si + CO | SiC + 1/3O3 → Si + CO |
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