Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process

<table>FTIR transmittance spectra of nc-Si : H films deposited at different VHF and VHF + MW power.</table>

International Scholarly Research Notices

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Figure 1

Figure 1: Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process 

Figure 1 | Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process 