Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process

<table>Raman spectra of nc-Si : H films having various crystalline fraction and hydrogen content (deconvoluted into four Gaussian distributions).</table>

International Scholarly Research Notices

fig8

Figure 8

Figure 8: Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process 

Figure 8 | Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process 