Measurements of Young’s modulus and factor for doubly clamped beams. (a) Plot showing the frequency of the fundamental mode of all the doubly-clamped beams and Si cantilevers versus . The cantilevers are shown as solid triangles. The doubly clamped beams with nm are indicated as solid squares while those with 7 nm are shown as hollow squares. The solid line is the theoretical prediction with no tension. (b) Plot of the quality factor as a function of the thickness for all resonators [124].