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MEMS device description | Design/dimensions | Resonant frequency | Power output/voltage (reported) | Ref |
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AIN and PZT MEMS devices. | Piezoelectric generator located on top of a beam, piezoelectric layer sandwiched between top and bottom electrodes | 300; 700 and 1000 Hz | 1–100 μW | [68] |
Energy harvesting MEMS device based on thin film PZT cantilevers, | Cantilever size: length = 13.5 mm, width = 9 mm, thickness = 192 μm | 3 modes: 13.9; 21.9 and 48.5 kHz | 2.4 V with 5.2 MΩ load, 1.01 μW | [69] |
PZT-based MEMS with interdigital electrodes | Cantilever size: length = 3.000 μm, width = 1.500 μm, thickness = 22 μm | 570–575 Hz |
1.127 , 0.123 μW | [70] |
PZT harvesters and MEMS technology | Device packaged using two wafers | 1.8 kHz | 40 μW | [71] |
Thin film PZT-based MEMS power generator array for vibration energy harvesting, operating in d31 mode | Cantilever size: 2.000–3.500 μm, width = 750–1.000 μm | 226–234 Hz | 3.98 μW; 3.93 V | [72] |
Thick film PZT free standing energy harvester operating in d31 mode | Cantilever size: length = 13.5 mm, width = 9 mm, thickness = 192 μm | 229 Hz | 270 nW at 9.81 m/s2; 130 V | [73] |
Two layered PMNZT bender devices for micropower generation | Cantilever size: length = 10 mm, width = 10 mm | 120 Hz | 2.0 0.5 mW | [74] |
Laser machined piezoelectric cantilever devices for energy harvesting | 10 cantilevers on both sides of ridge, 5 of them are placed with tip mass alternately:length = 5.74 mm, width = 4 mm | 870 Hz | 1.13 μW at 870 Hz through 288.5 kΩ, power density of 301.3 μW/cm3 | [75] |
Multilayer unimorph PZT cantilever with micromachined Si proof mass based on SOI | Device volume (mass and beam)~0.7690 mm3 | 183.8 Hz | 0.32 μW with 16.0 kΩ load; power density of 416 μW/cm3 | [76] |
High performance MEMS PZT thin film energy harvester based on d33 mode | 800 × 100 μm2 cantilever with 10 μm thickness, proof mass of 1000 × 1000 × 500 μm3 | 528 Hz | 1.1 μW with 2.2 MΩ load; 4.4 operating at vibration of 0.39 g. Power density 2.8 mWcm-3 g−1 | [77] |
Piezoelectric energy harvesters based on Aluminum nitride (AIN) | Cantilever devices: length = 1.31 mm–2.10 mm, width = 3.0 mm–7.0 mm | 200–1200 Hz | 60 μW at 572 Hz, 2 g vibration level. | [78] |
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