Dataset Papers in Science

Dataset Paper

Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Table 5

Row data from Figure 5 and details of the AFM images and the size distribution data associated with Figure 5 values.
(mm) (sccm) (sccm)Average NP size (nm)NP ·  m−2 · s−1AFM imagesSize distribution file
17010605.2 ± 1.04.4 ± 0.4Images 5–9Dataset Item 4
707.6 ± 0.919.7 ± 0.7Images 60–63Dataset Item 16
903.6 ± 0.911.7 ± 0.4Images 64–67Dataset Item 17