Research Article
A Study on the Thermodynamics of Grain Growth in R.F. Magnetron Sputtered NiO Thin Films
Table 2
Lattice parameters of annealed NiO thin films with respect to Ni powder.
| | Parameter | Ni powder | S2 | S3 | S4 | S5 |
| | 4.174 | 4.183 | 4.1829 | 4.161 | 4.160 | | 4.176 | 4.166 | 4.162 | 4.168 | 4.168 | | — | 4.186 | 4.178 | 4.179 | 4.170 | | — | 0.002 | 0.016 | 0.011 | 0.010 | | 0.002 | 0.017 | 0.12 | 0.0073 | 0.006 | | Grain size (nm) | 80 | 14 | 15 | 16 | 15 |
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