Optical Emission Spectroscopic Analysis of Plasma Plume during Pulsed Laser Deposition of PZT
Figure 9
The XRD pattern of PZT thin films deposited at different pressures mbar to 0.1 mbar ((a) to (d)) and then annealed at 750°C and 500°C and (e) at 600°C ( represents the pyrochlore phase and * represents substrate).
