Microstructural and Electrochemical Properties of rf-Sputtered LiFeO<sub>2</sub> Thin Films

<table>(a) X-ray diffraction spectra of as-deposited (<svg height="15.8375" id="M26" style="vertical-align:-3.39066pt" version="1.1" viewbox="0 0 16.525 15.8375" width="16.525" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.55)"><path d="M649 676l-22 -187l-33 -2q3 56 -12 94q-8 20 -31.5 26.5t-86.5 6.5h-74l-90 -491q-4 -23 -6 -36.5t1 -25t7 -16.5t18 -9t27 -5t41 -3l-6 -28h-286l4 28q68 5 84 18.5t28 76.5l94 491h-55q-74 0 -100.5 -6t-41.5 -23q-24 -29 -54 -98l-32 1q32 98 53 188h22q7 -18 15 -22
t37 -4h417q23 0 33.5 5t25.5 21h23z" id="x1D447"></path></g>
<g transform="matrix(.012,-0,0,-.012,11.388,15.637)"><path d="M352 391q0 -31 -27 -44q-14 -7 -24 6q-39 48 -84 48q-23 0 -39.5 -15t-16.5 -40q0 -43 73 -90q49 -32 70 -58t21 -57q0 -58 -62 -105.5t-129 -47.5q-40 0 -75.5 25t-35.5 52q0 28 32 46q7 4 15 3t11 -6q19 -31 48.5 -50.5t54.5 -19.5q34 0 54 19.5t20 42.5q0 43 -65 81
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</svg>) and annealed (<svg height="15.8375" id="M27" style="vertical-align:-3.39066pt" version="1.1" viewbox="0 0 18.0875 15.8375" width="18.0875" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.55)"><path d="M649 676l-22 -187l-33 -2q3 56 -12 94q-8 20 -31.5 26.5t-86.5 6.5h-74l-90 -491q-4 -23 -6 -36.5t1 -25t7 -16.5t18 -9t27 -5t41 -3l-6 -28h-286l4 28q68 5 84 18.5t28 76.5l94 491h-55q-74 0 -100.5 -6t-41.5 -23q-24 -29 -54 -98l-32 1q32 98 53 188h22q7 -18 15 -22
t37 -4h417q23 0 33.5 5t25.5 21h23z" id="x1D447"></path></g>
<g transform="matrix(.012,-0,0,-.012,11.388,15.637)"><path d="M483 97q-42 -50 -88.5 -79.5t-68.5 -29.5q-37 0 -17 93l22 102h-2q-54 -79 -144 -149q-59 -46 -100 -46q-24 0 -43 29t-19 86q0 78 34.5 153t94.5 120q41 31 94 51.5t98 20.5q29 0 72 -9q26 -6 39 -6l2 -4q-30 -117 -67 -323q-8 -41 2 -41q16 0 79 58zM374 387
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</svg>) LiFeO<sub>2</sub> thin films. (b) X-ray diffraction spectrum of LiFeO<sub>2</sub> bulk powder.</table>

Journal of Nanoscience

fig1

Figure 1

Figure 1: Microstructural and Electrochemical Properties of rf-Sputtered LiFeO<sub>2</sub> Thin Films 

Journal of Nanoscience

Microstructural and Electrochemical Properties of rf-Sputtered LiFeO2 Thin Films

Figure 1

Microstructural and Electrochemical Properties of rf-Sputtered LiFeO₂ Thin Films