Review Article

Importance of Molds for Nanoimprint Lithography: Hard, Soft, and Hybrid Molds

Figure 4

(a) Schematic diagram of the solid parallel-plate press (mechanical press) nanoimprint method and potential drawbacks: (b1) failure of imprint due to imperfect plate surfaces, (b2) failure of imprint due to uneven mold/substrate backside, (b3) failure of imprint due to nonparallelism between plates, and (b4) failure of imprint due to curved sample surfaces.