| | Number | Defect number () | Density () | Deposition rate () |
| | 1 | (0.0000, 0.0000, 0.0002) | (0.0147, 0.0167, 0.0167) | (0.0156, 0.0179, 0.0180) | | 2 | (0.0004, 0.0004, 0.0138) | (0.0395, 0.0449, 0.0446) | (0.0395, 0.0453, 0.0451) | | 3 | (0.0057, 0.0188, 0.0304) | (0.0448, 0.0506, 0.0511) | (0.0446, 0.0509, 0.0515) | | 4 | (0.0017, 0.0018, 0.0034) | (0.0160, 0.0182, 0.0180) | (0.0390, 0.0447, 0.0444) | | 5 | (0.1111, 0.1409, 0.1898) | (0.0346, 0.0391, 0.0386) | (0.0793, 0.0903, 0.0895) | | 6 | (0.0385, 0.0741, 0.2274) | (0.0217, 0.0247, 0.0247) | (0.0533, 0.0611, 0.0613) | | 7 | (0.0718, 0.0737, 0.1697) | (0.0254, 0.0288, 0.0287) | (0.0827, 0.0947, 0.0945) | | 8 | (0.1361, 0.2238, 0.4772) | (0.0329, 0.0386, 0.0398) | (0.1100, 0.1300, 0.1345) | | 9 | (0.1841, 0.2147, 0.4938) | (0.0298, 0.0338, 0.0333) | (0.1249, 0.1425, 0.1408) | | 10 | (0.0000, 0.0000, 0.0003) | (0.0258, 0.0292, 0.0289) | (0.0269, 0.0307, 0.0304) | | 11 | (0.0000, 0.0001, 0.0003) | (0.0191, 0.0217, 0.0215) | (0.0217, 0.0247, 0.0246) | | 12 | (0.0045, 0.0219, 0.0733) | (0.0435, 0.0496, 0.0488) | (0.0422, 0.0484, 0.0478) | | 13 | (0.0020, 0.0121, 0.0465) | (0.0204, 0.0233, 0.0231) | (0.0573, 0.0658, 0.0654) | | 14 | (0.0019, 0.0070, 0.0091) | (0.0216, 0.0244, 0.0241) | (0.0496, 0.0565, 0.0560) | | 15 | (0.1593, 0.1747, 0.2186) | (0.0241, 0.0272, 0.0273) | (0.0593, 0.0675, 0.0678) | | 16 | (0.0003, 0.0022, 0.0033) | (0.0235, 0.0266, 0.0262) | (0.0834, 0.0952, 0.0939) | | 17 | (0.1615, 0.1836, 0.5477) | (0.0298, 0.0346, 0.0358) | (0.1105, 0.1294, 0.1343) | | 18 | (0.2532, 0.2908, 0.8081) | (0.0272, 0.0308, 0.0303) | (0.0993, 0.1132, 0.1119) |
|
|
