Review Article

Hybrid Materials for Integrated Photonics

Figure 16

Example of nanostructures transferred into a sol-gel thin layer. The pattern was created using electron-beam lithography into a commercial resist. After the development of the resist, the pattern was transferred into the sol-gel glass. (a) AFM map of a patterned area. (b) Height profile. The lattice pitch of the one-dimensional grating inscribed is of 200 nm.
891395.fig.0016a
(a)
891395.fig.0016b
(b)