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Advances in Optical Technologies
Volume 2008 (2008), Article ID 276165, 6 pages
Research Article

Optical Filters Utilizing Ion Implanted Bragg Gratings in SOI Waveguides

1Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON, Canada L8S 4J1
2Advanced Technology Institute, University of Surrey, Guildford, Surrey GU2 4EL, UK

Received 6 January 2008; Accepted 13 March 2008

Academic Editor: Pavel Cheben

Copyright © 2008 M. P. Bulk et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The refractive index modulation associated with the implantation of oxygen or silicon into waveguides formed in silicon-on-insulator (SOI) has been investigated to determine the feasibility of producing planar, implantation induced Bragg grating optical filters. A two-dimensional coupled mode theory-based simulation suggests that relatively short grating lengths, on the order of a thousand microns, can exhibit sufficient wavelength suppression, of >10 dB, using the implantation technique. Fabricated planar implanted slab-guided SOI waveguides demonstrated an extinction of 10 dB for TE modes and 6 dB for TM modes for the case of oxygen implantation. Extinctions of 5 dB and 2 dB have been demonstrated with silicon implantation.