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Advances in Optical Technologies
Volume 2008 (2008), Article ID 412518, 15 pages
http://dx.doi.org/10.1155/2008/412518
Research Article

Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer

1CEA-Leti, MINATEC, 17 rue des Martyrs, 38054 Grenoble, France
2Institut d'Electronique Fondamentale, Université Paris-Sud XI, UMR8622, CNRS, Bat. 220, 91405 Orsay Cedex, France
3Institut des Nanotechnologies de Lyon, Université de Lyon, INL-UMR5270, CNRS, INSA de Lyon, 69621 Villeurbanne, France
4Institut des Nanotechnologies de Lyon, Université de Lyon, INL-UMR5270, CNRS, Ecole Centrale de Lyon, 69134 Ecully, France

Received 6 December 2007; Accepted 13 March 2008

Academic Editor: Pavel Cheben

Copyright © 2008 J. M. Fedeli et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

J. M. Fedeli, L. Di Cioccio, D. Marris-Morini, et al., “Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer,” Advances in Optical Technologies, vol. 2008, Article ID 412518, 15 pages, 2008. doi:10.1155/2008/412518