Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer

<table>Evolution of Q for the 1.5 <i>μ</i>m nearest mode for a 2.5 <i>μ</i>m radius
 InP <i>μ</i>disk (0.545 <i>μ</i>m thick) in silica with a 100 nm slab.</table>

Advances in Optical Technologies

fig23

Figure 23

Figure 23: Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer 