Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer

<table>RP-CVD germanium epitaxy in a recess at the output of a silicon rib
waveguide.</table>

Advances in Optical Technologies

Figure 8: Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer 