Stress Induced Effects for Advanced Polarization Control in Silicon Photonics Components

<table>Stress-induced modal birefringence
<svg height="15.65" id="M103" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 24.5375 15.65" width="24.5375" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.362)"><path d="M600 0h-557v24l268 633l28 8l261 -641v-24zM497 50l-194 489l-196 -489h390z" id="x394"></path></g><g transform="matrix(.017,-0,0,-.017,10.959,11.362)"><path d="M495 86q-46 -47 -87 -72.5t-63 -25.5q-43 0 -16 107l49 210q7 34 8 50.5t-3 21t-13 4.5q-35 0 -109.5 -72.5t-115.5 -140.5q-21 -75 -38 -159q-50 -10 -76 -21l-6 8l84 340q8 35 -4 35q-17 0 -67 -46l-15 26q44 44 85.5 70.5t64.5 26.5q35 0 10 -103l-24 -98h2
q42 56 97 103.5t96 71.5q46 26 74 26q9 0 16 -2.5t14 -11.5t9.5 -24.5t-1 -44t-13.5 -68.5q-30 -117 -47 -200q-4 -19 -3.5 -25t6.5 -6q21 0 70 48z" id="x1D45B"></path></g>
<g transform="matrix(.012,-0,0,-.012,19.488,15.45)"><path d="M319 325l-25 -7q-33 99 -103 99q-29 0 -47 -19.5t-18 -49.5t22 -49.5t62 -36.5q63 -26 95 -57t32 -79q0 -64 -50 -101t-115 -37q-35 0 -67.5 10.5t-46.5 23.5q-5 11 -11 51t-6 67l27 5q14 -53 46.5 -88.5t75.5 -35.5q29 0 50 19.5t21 50.5t-19.5 51.5t-59.5 39.5
q-28 12 -46 22.5t-38.5 27t-30.5 38.5t-10 49q0 54 42.5 92t109.5 38q48 0 88 -18q6 -15 13 -50.5t9 -55.5z" id="x73"></path></g>
</svg> for ridge
waveguides with different aspect ratios, with <svg height="11.175" id="M104" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 15.0375 11.175" width="15.0375" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.113)"><path d="M865 650q-1 -4 -4 -14t-4 -14q-62 -5 -77 -19.5t-29 -82.5l-74 -394q-12 -61 -0.5 -77t75.5 -21l-6 -28h-273l8 28q64 5 82 21t29 76l36 198h-380l-37 -197q-11 -64 0.5 -78.5t79.5 -19.5l-6 -28h-268l6 28q60 6 75.5 21.5t26.5 76.5l75 394q13 66 2 81.5t-77 20.5l8 28
h263l-6 -28q-58 -5 -75.5 -21t-30.5 -81l-26 -153h377l29 153q12 67 2 81t-74 21l5 28h268z" id="x1D43B"></path></g>
</svg> = 2 <svg height="12.175" id="M105" style="vertical-align:-3.56265pt" version="1.1" viewbox="0 0 9.5625 12.175" width="9.5625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,7.675)"><path d="M538 96q-38 -45 -84 -76.5t-71 -31.5q-44 0 -15 117q12 49 18 89h-2q-99 -128 -163 -178q-36 -28 -70 -28q-26 0 -44 38h-2q-16 -69 -16 -129q0 -43 11 -75.5t24 -42.5l1 -6q-7 -12 -24.5 -23t-37.5 -11q-40 0 -40 76q0 52 35 202l94 407l78 24l5 -5q-32 -122 -72 -310
q-7 -33 0 -55t25 -22q36 0 105.5 75t107.5 145l32 146l75 26h10q-50 -197 -78 -347q-7 -38 6 -38q7 0 31 17t47 39z" id="x1D707"></path></g>
</svg>m, <svg height="14.4125" id="M106" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 11.575 14.4125" width="11.575" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,10.125)"><path d="M324 430l-26 -36l-112 -4l-55 -265q-13 -66 7 -66q13 0 44.5 20t50.5 40l17 -24q-38 -40 -85.5 -73.5t-87.5 -33.5q-50 0 -21 138l55 262h-80l-2 8l25 34h66l25 99l78 63l10 -9l-37 -153h128z" id="x1D461"></path></g>
<g transform="matrix(.012,-0,0,-.012,5.862,14.2)"><path d="M390 111l17 -21q-34 -45 -80 -73.5t-89 -28.5q-91 0 -146 62t-55 147q0 118 101 195q74 57 149 57h1q59 0 90 -27q16 -14 16 -30q0 -15 -12 -29t-21 -14q-8 0 -19 11q-44 41 -101 41q-52 0 -87.5 -42.5t-35.5 -117.5q0 -49 15 -87t39 -58t49 -30t48 -10q33 0 60.5 12
t60.5 43z" id="x63"></path></g>
</svg> = 2 <svg height="12.175" id="M107" style="vertical-align:-3.56265pt" version="1.1" viewbox="0 0 9.5625 12.175" width="9.5625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,7.675)"><path d="M538 96q-38 -45 -84 -76.5t-71 -31.5q-44 0 -15 117q12 49 18 89h-2q-99 -128 -163 -178q-36 -28 -70 -28q-26 0 -44 38h-2q-16 -69 -16 -129q0 -43 11 -75.5t24 -42.5l1 -6q-7 -12 -24.5 -23t-37.5 -11q-40 0 -40 76q0 52 35 202l94 407l78 24l5 -5q-32 -122 -72 -310
q-7 -33 0 -55t25 -22q36 0 105.5 75t107.5 145l32 146l75 26h10q-50 -197 -78 -347q-7 -38 6 -38q7 0 31 17t47 39z" id="x1D707"></path></g>
</svg>m, and <svg height="12.175" id="M108" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 29.75 12.175" width="29.75" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,8.038)"><path d="M548 455q-32 -77 -74 -77q-37 0 -103 10l-3 -2q36 -30 48.5 -62t12.5 -80q0 -103 -75 -179.5t-175 -76.5q-70 0 -113 45t-43 128q0 115 83.5 200.5t209.5 85.5q31 0 77.5 -4t67.5 -4q36 0 62 30zM350 274q0 54 -17 86q-19 35 -57 35q-50 0 -90 -37.5t-59 -91.5t-19 -109
q0 -61 24.5 -96.5t65.5 -35.5q51 0 87.5 46.5t50.5 100.5t14 102z" id="x1D70E"></path></g>
<g transform="matrix(.012,-0,0,-.012,9.663,12.112)"><path d="M523 15v-15h-220v15c31.3333 3.33333 50.3333 9.33333 57 18c7.33545 9.33333 11.0021 31.3333 11 66v261c0 25.3337 -5.66666 41.0004 -17 47c-10.6668 6.66666 -39.3335 10 -86 10h-84v-327c0 -28 4.5 -47 13.5 -57s27.1667 -16 54.5 -18v-15h-220v15
c28 0.666667 46.3333 6.33333 55 17c8.66666 10.6667 13 32 13 64v321h-67v33h68c6 53.3337 13 92.0004 21 116c8.66667 23.3333 25.6667 46.6667 51 70c37.3333 31.3333 86.3333 47 147 47c39.3336 0 70.0003 -6 92 -18c22 -12.0018 33 -28.6685 33 -50
c0 -27.3344 -11.6667 -41.0011 -35 -41c-11.3333 0 -22.8333 7 -34.5 21s-24.6667 28 -39 42s-30.1667 21 -47.5 21c-30 -0.00128174 -55 -10.6679 -75 -32c-12.6667 -12.6667 -20.8333 -27.6667 -24.5 -45c-3.66667 -17.3339 -5.5 -46.0005 -5.5 -86v-45h154
c28.6667 0.00170898 66.6667 3.6684 114 11l5 -4c-1.33334 -46.6667 -2 -79.6667 -2 -99v-259c0.00259399 -30.6667 4.66928 -51.6667 14 -63c9.33334 -11.3333 27.3333 -18.3333 54 -21z" id="xFB01"></path></g><g transform="matrix(.012,-0,0,-.012,16.302,12.112)"><path d="M238 0h-223v26q48 5 60 17t12 61v473q0 50 -10.5 60.5t-58.5 15.5v24q73 8 148 35v-608q0 -49 11.5 -61t60.5 -17v-26z" id="x6C"></path></g><g transform="matrix(.012,-0,0,-.012,19.312,12.112)"><path d="M797 0h-214v26q46 5 58 17.5t12 63.5v167q0 116 -88 116q-48 0 -112 -52q3 -18 3 -42v-195q0 -46 11 -58t53 -17v-26h-214v26q48 5 59.5 17t11.5 60v172q0 115 -88 115q-47 0 -109 -52v-235q0 -47 10 -59.5t48 -17.5v-26h-211v26q50 5 62.5 17t12.5 60v207q0 48 -9 59.5
t-52 18.5v23q79 14 139 41v-81q3 2 29 20.5t44 29.5q45 28 81 28t66 -22t46 -61q25 20 83 57q39 26 76 26q59 0 93 -40t34 -113v-193q0 -49 10.5 -60.5t54.5 -16.5v-26z" id="x6D"></path></g>
</svg> = −300 MPa.</table>

Advances in Optical Technologies

fig5

Figure 5

Figure 5: Stress Induced Effects for Advanced Polarization Control in Silicon Photonics Components 