Collective Micro-Optics Technologies for VCSEL Photonic Integration
Figure 11
(a) Hybrid assembly of a movable silicon 45°-micromirror for VCSEL-fiber active alignment (reprinted from [52] Elsevier 2003). (b) MEMS-based VCSEL including a diffractive lens on a reported silicon MEMS for optical beam steering (reprinted from [53] Elsevier 2008).
