Collective Micro-Optics Technologies for VCSEL Photonic Integration
Figure 9
(a) Principle of lens integration on VCSEL wafer using a local dispending method coupled to high aspect ratio cylindrical SU-8 pedestals: the low-viscosity polymer is self-centered on the top of the pedestal owing to surface tension properties. (b) SEM images of inkjet-printed lenses (reprinted from [44], SPIE 2005). (c) SEM image of a spotted lens. Inset: SEM image of a microlens self-centered on SU-8 cylindrical pedestal (reprinted from [46], IEEE 2010).
