Realization of Ultraflat Plastic Film Using Dressed-Photon-Phonon-Assisted Selective Etching of Nanoscale Structures

Figure 3

Etching time dependence of surface roughness, . Blue solid squares correspond to using 3.81 eV He-Cd laser (DPP etching). Red solid circles correspond to using 5.82 eV 5th-harmonic Nd:YAG laser (conventional photochemical etching).