Electron-Collision-Induced Dissociative Ionization Cross Sections for Silane

Figure 3

(a) The double differential cross sections (in the units of 10⁻²⁰cm²/eV-sr) as a function of energy loss 𝑊 at (𝜃=30^∘ and 𝐸=100eV) for the production of cations from electron impact ionization of SiH₄. (b) Same as (a) but at (𝜃=60^∘ and 𝐸=100eV). (c) Same as (a) but at (𝜃=30^∘ and 𝐸=200eV). (d) Same as (a) but at (𝜃=60^∘ and 𝐸=200eV).

(a)

(b)

(c)

(d)