Electron-Collision-Induced Dissociative Ionization Cross Sections for Silane

Figure 6

Presently calculated total ionization cross sections (in the units of 10⁻¹⁶cm²) for electron impact ionization of SiH₄ (designated by solid line) in comparison with the various experimental data sets designated by —Perrin et al. [7], ×—Chatham et al. [8], —Krishnakumar and Srivastava [9], and —Basner et al. [10] and theoretical data sets designated by BEB calculations [13, 28] and —Joshipura et al. [16, 17].