Characterization of the Chemical Kinetics in an O<sub><b>2</b></sub>/HMDSO RF Plasma for Material Processing

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Advances in Physical Chemistry

fig8

Figure 8

Figure 8: Characterization of the Chemical Kinetics in an O<sub><b>2</b></sub>/HMDSO RF Plasma for Material Processing 

Advances in Physical Chemistry

Characterization of the Chemical Kinetics in an O2/HMDSO RF Plasma for Material Processing

Figure 8

Characterization of the Chemical Kinetics in an O₂/HMDSO RF Plasma for Material Processing