Table of Contents
Conference Papers in Energy
Volume 2013, Article ID 104047, 5 pages
Conference Paper

Structural, Optical, and Electrochromic Properties of Pure and Mo-Doped WO3 Films by RF Magnetron Sputtering

Department of Physics, Sri Venkateswara University, Tirupati 517 502, India

Received 2 January 2013; Accepted 3 April 2013

Academic Editors: P. Agarwal, B. Bhattacharya, U. P. Singh, and B. Sopori

This Conference Paper is based on a presentation given by Vempuluri Madhavi at “International Conference on Solar Energy Photovoltaics” held from 19 December 2012 to 21 December 2012 in Bhubaneswar, India.

Copyright © 2013 Vempuluri Madhavi et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Pure and Mo-doped WO3 films were formed on ITO-coated glass substrate held at 473 K by RF magnetron sputtering technique. The structural, morphological, and optical properties of pure and Mo-doped WO3 thin films have been systematically studied. The structural properties revealed that the pure WO3 films exhibited a (020) reflection related to the orthorhombic phase of WO3, whereas Mo-doped films showed (200) reflection. The surface morphology revealed that pure WO3 films showed the dense surface and Mo-doped films contained agglomerated grains which were uniformly distributed on the surface of the substrate. The optical transmittance decreased from 85% to 75% for pure and Mo-doped WO3 films, respectively. The electrochromic properties of the films were measured by cyclic voltametry in 1 M Li2SO4 electrolyte solution. The optical modulation of pure WO3 films at near IR was 50%, and the calculated color efficiency was 33.8 cm2/C, while in Mo-doped WO3 the efficiency improved to 42.5 cm2/C.