Table of Contents
Conference Papers in Engineering
Volume 2013, Article ID 265709, 4 pages
Conference Paper

Cantilever Beam Metal-Contact MEMS Switch

Electrical and Electronic Engineering Department, University of Tripoli, Tripoli, Libya

Received 21 February 2013; Accepted 29 April 2013

Academic Editors: M. Buamod, M. Elmusrati, A. Gaouda, and H. Koivo

This Conference Paper is based on a presentation given by Adel Saad Emhemmed at “International Conference on Electrical and Computer Engineering” held from 26 March 2013 to 28 March 2013 in Benghazi, Libya.

Copyright © 2013 Adel Saad Emhemmed and Abdulmagid A. Aburwein. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


We present a new design of a miniature RF microelectromechanical system (MEMS) metal-contact switch and investigate various aspects associated with lowering the pull-down voltage and overcoming the stiction problem. Lowering the pull-down voltage in this design is based on reducing the spring constant by changing the cantilever beam geometry of the RF MEMS switch, and the stiction problem is overcome by a simple integrated method using two tiny posts located on the substrate at the free end of the cantilever beam.