Development of Textured ITO Optical Windows for Photovoltaic Applications

<table>Optical transmittance spectra of ITO thin film sputtered using 30 W of rf power and oxygen dilution at a <svg height="15.8375" id="M3" style="vertical-align:-3.3907pt" version="1.1" viewbox="0 0 16.525 15.8375" width="16.525" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.55)"><path d="M649 676l-22 -187l-33 -2q3 56 -12 94q-8 20 -31.5 26.5t-86.5 6.5h-74l-90 -491q-4 -23 -6 -36.5t1 -25t7 -16.5t18 -9t27 -5t41 -3l-6 -28h-286l4 28q68 5 84 18.5t28 76.5l94 491h-55q-74 0 -100.5 -6t-41.5 -23q-24 -29 -54 -98l-32 1q32 98 53 188h22q7 -18 15 -22
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</svg> of 250°C.</table>

Conference Papers in Science

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Figure 5

Figure 5: Development of Textured ITO Optical Windows for Photovoltaic Applications 