Development of Textured ITO Optical Windows for Photovoltaic Applications
Figure 3
(a) SEM image of the ITO film sputtered at rf power of 30 W at °C. (b) SEM image of the ITO film sputtered at rf power of 80 W and of 250°C. (c) SEM image of the film deposited using 30 W and oxygen dilution.
