Conference Paper
ZnO Thin Film Deposition for TCO Application in Solar Cell
Table 1
Deposition parameters.
| | Sample ID | Total operating pressure | Oxygen variation | | O2 flow | O2 % | | Unit | mBar | SCCM | % |
| | A | 4 × 10−3 | 13.5 | 25% | | B | 4.5 × 10−3 | 12.5 | 21% | | C | 4.5 × 10−3 | 11.5 | 19% | | D | 5 × 10−3 | 10.0 | 17% | | E | 5 × 10−3 | 09.0 | 14% |
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