Conference Paper
ZnO Thin Film Deposition for TCO Application in Solar Cell
Table 2
Results of deposited film before annealing.
| | Before annealing (as deposited) | | Sample ID | Sheet resistance of the film | Thickness of film | Resistivity of the film | Transparency of the film | Band gap of the film | | Unit | Ω | nm | Ω · cm | % | eV |
| | A | High** | 550 | High** | 81.6 | 3.14 | | B | 2.27 | 650 | 6.69 × 10−2 | 87.3 | 3.12 | | C | 7.116 | 710 | 2.29 × 10−1 | 87.3 | 3.14 | | D | 0.304 | 530 | 7.30 × 10−3 | 60.2 | 3.0 | | E | 0.216 | 530 | 5.19 × 10−3 | 60.3 | 3.12 |
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High Resistivity means it is such high that is not in the measurement range of the available four-probe instrument at our lab.
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