Conference Paper
ZnO Thin Film Deposition for TCO Application in Solar Cell
Table 3
Results of films after annealing treatment.
| | After annealing at 300°C for 2 Hrs in vacuum (2 × 10−5 mBar) | | Sample ID | Sheet resistance of the film | Thickness of film | Resistivity of the film | Transparency of the film | Band gap of the film | | Unit | Ω | nm | Ω · cm | % | eV |
| | A | 0.0616 | 650 | 1.81 × 10−3 | 84.2 | 3.19 | | B | 0.041 | 830 | 1.54 × 10−3 | 80.8 | 3.2 | | C | 0.457 | 580 | 1.20 × 10−2 | 85.9 | 3.2 | | D | 0.0903 | 640 | 2.62 × 10−3 | 74.2 | 3.1 | | E | 0.0445 | 645 | 1.30 × 10−3 | 61 | 3.18 |
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