NO<sub>2</sub> Sensing Properties of WO<sub>3</sub> Thin Films Deposited by Rf-Magnetron Sputtering

<table>Variation of sensor resistance in air (<svg height="15.4" id="M22" style="vertical-align:-3.22281pt" version="1.1" viewbox="0 0 16.9125 15.4" width="16.9125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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t-115.5 -72q40 -86 66 -133q39 -68 65 -101q28 -37 73 -51zM491 483q0 67 -33.5 101t-91.5 34q-35 0 -51 -10q-13 -8 -20 -48l-45 -245h49q71 0 113 28q79 52 79 140z" id="x1D445"></path></g>
<g transform="matrix(.012,-0,0,-.012,11.013,15.187)"><path d="M433 39l-85 -51q-27 0 -47 20q-16 16 -24 44q-5 -3 -24 -16.5t-27 -18.5t-23 -13.5t-25 -12t-19 -3.5q-52 0 -86 36.5t-34 85.5q0 71 81 99q128 43 155 65v17q0 54 -23 83.5t-62 29.5q-28 0 -45 -19t-29 -66q-7 -23 -29 -23q-15 0 -29 13t-14 30t31 40q25 19 68.5 40.5
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</svg>) with temperature for the sensor structures: WO<sub>3</sub>/Sn, WO<sub>3</sub>/Zn, and WO<sub>3</sub>/Pt.</table>

Conference Papers in Science

fig4

Figure 4

Figure 4: NO<sub>2</sub> Sensing Properties of WO<sub>3</sub> Thin Films Deposited by Rf-Magnetron Sputtering 

Conference Papers in Science

NO2 Sensing Properties of WO3 Thin Films Deposited by Rf-Magnetron Sputtering

Figure 4

NO₂ Sensing Properties of WO₃ Thin Films Deposited by Rf-Magnetron Sputtering