NO<sub>2</sub> Sensing Properties of WO<sub>3</sub> Thin Films Deposited by Rf-Magnetron Sputtering

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td align="left">Sensor</td><td align="center">Sensor response</td><td align="center">Operating temperature (°C)</td><td align="center">Response time</td><td align="center">Recovery time</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td align="left">WO<sub>3</sub>/Sn</td><td align="center">238</td><td align="center">200</td><td align="center">32 sec</td><td align="center">15.3 min</td></tr><tr><td align="left">WO<sub>3</sub>/Zn</td><td align="center">173</td><td align="center">250</td><td align="center">5.2 min</td><td align="center">18 min</td></tr><tr><td align="left">
								WO<sub>3</sub>/Pt</td><td align="center">118</td><td align="center">270</td><td align="center">4.6 min</td><td align="center">17 min</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Sensor response, response time, and recovery time at their respective operating temperatures for the fabricated sensor structures.

Conference Papers in Science

tab2

Table 2

Table 2: NO<sub>2</sub> Sensing Properties of WO<sub>3</sub> Thin Films Deposited by Rf-Magnetron Sputtering 

Conference Papers in Science

NO2 Sensing Properties of WO3 Thin Films Deposited by Rf-Magnetron Sputtering

Table 2

NO₂ Sensing Properties of WO₃ Thin Films Deposited by Rf-Magnetron Sputtering