Dataset Papers in Science / 2013 / Article / Tab 1

Dataset Paper

Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Table 1

Working parameters in the Ion Cluster Source and Multiple Ion Cluster Sources equipments.

Working parameters Ion Cluster
Source (ICS)
Multiple Ion Cluster Source (MICS)

Flux of additional gas
Aperture size
Power , ,
Flux of sputtering gas , ,
Aggregation length , ,

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