Dataset Papers in Science / 2013 / Article / Tab 3

Dataset Paper

Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Table 3

Row data from Figure 3 and details of the AFM images and the size distribution data associated with Figure 3 values.

= 60 sccm
(mm) (sccm)Average NP Size (nm)NP ·  m−2 · s−1AFM imagesSize distribution file

1705 Images 1–4Dataset Item 3
125 Images 14–19Dataset Item 6
95 Images 28–32Dataset Item 9

17010 Images 5–9Dataset Item 4
125 Images 20–22Dataset Item 7
95 Images 33–37Dataset Item 10

17020 Images 10–13Dataset Item 5
125 Images 23–27Dataset Item 8
95 Images 38–42Dataset Item 11

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