Sensitivity Studies and Parameters Identification for Noisy 3D Moving AWJM Model

Figure 11

Results of numerical identification of the etching rate functions for AWJM model and prediction of the surface shapes based on single trench measurement with applied noises of 5%, 15%, and 30%, respectively.

(a) Single trench, 5% of noise

(b) Single trench, 15% of noise

(c) Single trench, 30% of noise