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International Journal of Microwave Science and Technology
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Special Issues
International Journal of Microwave Science and Technology
/
2010
/
Article
/
Fig 7
/
Research Article
A New Process for On-Chip Inductors with High
Q
-Factor Performance
Figure 7
-factor of benchmark, standard, and underetching processed for typical inductor with outer diameter 213
m, inductance
nH.