Table of Contents
International Journal of Microwave Science and Technology
Volume 2010, Article ID 517187, 9 pages
http://dx.doi.org/10.1155/2010/517187
Research Article

A New Process for On-Chip Inductors with High Q-Factor Performance

Department Automotive/Industrial, Infineon Technologies AG, Am Campeon 1-12, D-85579 Neubiberg, Germany

Received 21 April 2010; Revised 21 June 2010; Accepted 3 August 2010

Academic Editor: Ichihiko Toyoda

Copyright © 2010 Kevni Büyüktas et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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