Table of Contents
International Journal of Microwave Science and Technology
Volume 2014, Article ID 862649, 12 pages
Research Article

Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam

1NPMaSS MEMS Design Centre, Department of Electronics and Instrumentation Engineering, Annamalai University, Annamalai Nagar, Tamilnadu 608002, India
2Department of Civil and Structural Engineering, Annamalai University, Annamalai Nagar 608002, India

Received 29 May 2014; Revised 10 September 2014; Accepted 19 September 2014; Published 20 October 2014

Academic Editor: Giancarlo Bartolucci

Copyright © 2014 M. Manivannan et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The present authors have earlier reported the employment of varying section fixed-fixed beam for achieving lower pull-in voltage with marginal fall in restoring force. Reducing Young’s modulus also reduces the pull-in voltage but with lesser degree of reduction in restoring force. Composite beams are ideal alternatives to achieve decreased Young’s modulus. Hence new varying section composite fixed-fixed beam type RF MEMS switch has been proposed. The main advantage of this RF MEMS switch is that lower pull-in voltages can be achieved with marginal fall in stiction immunity. Spring constant of the proposed switch has been obtained using simulation studies and it has been shown that the spring constant and therefore the pull-in voltage () can be considerably reduced with the proposed switch. Simulation studies conducted on the proposed switch clearly demonstrate that the pull-in voltage can be reduced by 31.17% when compared to the varying section monolayer polysilicon fixed-fixed beam. Further this approach enables the designer to have more freedom to design lower pull-in voltage switches with improved stiction immunity.