Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam

Table 1

Spring Constant Values.

Beam Length; (m)	Spring Constant Values		% Error
	Analytical; (1)	Simulated; (2)
150	334.5	324	3.1
225	98.16	99.11	0.1
300	41.81	41.61	0.05