Research Article
Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam
Table 2
Uniform Section Fixed-Fixed Beam Parameters.
| |
Beam Length (m) |
Electrostatic Area (m2) |
Restoring Force (N) | Pull-in Voltage (Volts) |
% Error | Analytical
(1) | Simulated
(2) | Electrostatic Analysis |
| | 150 | 2500 | 213.74 | 189.23 | 186.22 | 202.5 | 6.5 | | 225 | 3750 | 65.41 | 84.11 | 83.71 | 87 | 3.3 | | 300 | 5000 | 27.59 | 47.31 | 47.2 | 49.9 | 5.1 |
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