Research Article
Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam
Table 3
Estimated Device parameters.
| | Uniform Beam Type | Beam
Length (m) | Young’s
Modulus (GPa) |
(V) | % Error |
| | Composite | 150 | Al = 68.85
Poly-Si = 160 | 158.25 | 5% | | Equivalent Single Material | 150 | 114 | 166.3 |
| | Composite | 300 | Al = 68.85
Poly-Si = 160 | 39.85 | 3.8% | | Equivalent Single Material | 300 | 114 | 41.37 |
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