Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam

Table 4

Switching Time of the devices.

Fixed-Fixed; Beam Material		Switching; Time (sec)	Mass; (×10^−11 Kg)
Aluminium	3.12	0.77	1.4175
Composite	2.80	0.70	1.3126
Polysilicon	2.22	0.59	1.2075