Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam

Table 6

Pull-in Voltages Extracted from electrostatic deflection analysis.

Device ID	Pull-in Voltage; (Volts)	% reduction in
VSC1	173.75	—
VSC2	148.17	14.55
VSC3	129.98	25.18
VSC4	119.57	31.17
VSC5	47.21	—
VSC6	40.38	14.44
VSC7	35.48	24.71
VSC8	32.62	30.87