Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam

Table 7

Estimated Spring constant and Pull in Voltage.

Device—ID	Spring Constant (); In N/m	Pull-in Voltage (Volts)	% Reduction
			VSC1	226	155.57	—	—	—
VSC2	163.4	132.29	27.69	14.55	27
VSC3	125.3	115.88	44.55	25.18	44
VSC4	105.44	106.26	53	31.17	53
VSC5	33.46	42.32	—	—	—
VSC6	24.34	36.10	27.25	14.69	27.25
VSC7	18.76	31.69	43.93	25.11	43.94
VSC8	15.83	29.10	52.73	31.23	52.7